We have made some progress it seems. Googling I see "up to 0.05 nm" for transmission electron microscopes and "less than 0.1 nanometers" for scanning. https://www.kentfaith.co.uk/blog/article_which-electron-micr...
For comparison the distance between hydrogen nuclei in H2 is 0.074 nm I think.
You can see the shape of molecules but it's still a bit fuzzy to see individual atoms https://cosmosmagazine.com/science/chemistry/molecular-model...