Imagine a liquid which can be electrically charged, and has a low boiling point.
(Ask 3M/DuPont/BASF/Bayer... - context 'immersion cooling')
Attach heat-pipes with that stuff to the chips as is common now, or go the direct route via substrate-embedded microfluidics, as is thought of at the moment.
Radiate the shit out of it by spraying it into the vacuum, dispersing into the finest mist with highest possible surface, funnel the frozen mist back in after some distance, by electrostatic and/or electromagnetic means. Repeat. Flow as you go.